Multichannel Elliptical Ion Lens for Merging Multiple Hyperthermal Ion Beams

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Preparative mass spectrometry has been developed as a powerful tool for deposition of intact polyatomic ionic species with well-defined composition, charge state, kinetic energy and deposition pattern onto surfaces, which is also called ion soft landing. Current state of the art devices for ion soft landing lack the ability to merge more than two ion beams, which has limited further advancement of next-generation ion soft landing instrumentation.

Researchers at Purdue University have developed a device containing multichannel electrostatic elliptical lens with a precisely-defined electric field and a methodology to operate such a device. This technology is able to simultaneously merge and focus multiple, up to 20, hyperthermal ion beams with low ion loss to generate high-fluxes of polyatomic ions. An einzel lens is used after the elliptical lens to merge ion beams of 1-2000 eV kinetic energy. This technology is particularly valuable for depositing a wide variety of ionic species for conducting fundamental research to developing new materials and devices.

-Merge and focus multiple ion beams
-Low ion loss
-Deposition of multiple layers of different materials

Potential Applications:
-Material development
-Fundamental research
-Ion soft landing
-Analytical mass spectrometry instrumentation
Dec 16, 2021
United States

Jun 18, 2020

Jun 18, 2019
United States
Purdue Office of Technology Commercialization
The Convergence Center
101 Foundry Drive, Suite 2500
West Lafayette, IN 47906

Phone: (765) 588-3475
Fax: (765) 463-3486