Microelectromechanical Gas Sensor Based on Knudsen Thermal Force

Back to all technologies
Download as PDF
2015-ALEX-67217
Temperature moderating applications, particularly in lyophilization (freeze-drying) applications, are inefficient. Current vacuum gauges used to measure gas levels are bulky, require significant power, and cannot measure composition directly.

Researchers at Purdue University have developed a novel, microelectromechanical gas sensor to measure both the heat transfer rate and displacement of a known ambient gas mixture. This device is based on Knudsen thermal force and uses technology that creates a thermal gradient between the heater and surrounding gas and structure. This technology is particularly valuable as it is compact, all electric, and comparatively superior to vacuum gauges in low pressure environments, making it attractive for pharmaceutical lyophilization and high-altitude UAV/spacecraft, among other applications.

Advantages:
-Extracts both gas pressure and relative species concentration for a gas mixture
-Lightweight and compact
-All electric

Potential Applications:
-Pharmaceutical lyophilization
-High-altitude UAV/spacecraft
Jun 15, 2016
Utility Patent
United States
10,161,818
Dec 25, 2018

Dec 26, 2018
CON-Patent
United States
(None)
(None)

Jun 15, 2016
PCT-Patent
WO
(None)
(None)

Jun 15, 2015
Provisional-Patent
United States
(None)
(None)
Purdue Office of Technology Commercialization
1801 Newman Road
West Lafayette, IN 47906

Phone: (765) 588-3475
Fax: (765) 463-3486
Email: otcip@prf.org