MEMS Tunable Microwave Resonators and Filters

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Electrostatic actuation is a common method used to drive microelectromechanical systems (MEMS) devices. The activation is achieved by applying a voltage difference between opposite electrodes of a deformable capacitor. Currently, DC-bias line arrangements in electrostatic actuators substantially impair radio frequency performance and introduce power loss.

Purdue University researchers have developed a DC-bias line arrangement that permits electrostatic actuation of MEMS actuators for tunable microwave resonators and filters. It can achieve electrostatic actuation without compromising performance or introducing power loss.

Advantages:
-Achieves electrostatic actuation without compromising radio frequency performance or experiencing power loss

Potential Applications:
-Electronics industry
-Electronics manufacturing
May 31, 2013
Utility Patent
United States
9,325,052
Apr 26, 2016

Jun 1, 2012
Provisional-Patent
United States
(None)
(None)
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