Improving Switching Time in Electrostatic MEMS Actuators

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Electrostatic actuation is a common method used to drive microelectromechanical system (MEMS) devices achieved by applying a voltage difference between opposite electrodes of a deformable capacitor. Fringing is the field lines that occur outside of the contained field.

Purdue University researchers have developed an explicit algebraic expression that allows the calculation of time and voltage parameters of an input voltage signal that improves the switching times of severely underdamped MEMS actuators based on fringing-field actuation. Currently, no explicit analytical expressions exist to calculate the voltage and timing parameters of the input bias waveform.

Advantages:
-Allows calculation of voltage and timing parameters
-Improves switching time

Potential Applications:
-Microelectromechanical Engineering
Jun 3, 2013
Utility Patent
United States
9,166,271
Oct 20, 2015

Jun 1, 2012
Provisional-Patent
United States
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Jun 1, 2012
Provisional-Patent
United States
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Jun 1, 2012
Provisional-Patent
United States
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