Contact Metallization of Vertical Carbon Nanotubes

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Single-walled carbon nanotubes (SWNT) have application in many electronic and chemical sensing devices. In particular, devices containing electrical contacts with nanotubes have applications in electron emission, circuit design, and chemical and biological sensing. Currently, lithographic techniques are required to establish electrical contacts with nanotubes. These techniques are limited to two-dimensional architecture and generally produce low yields.

Researchers at Purdue University have developed a technology that provides both a robust process to synthesize SWNTs reproducibly in vertical channels suitable for device integration and facile means of electrically contacting the vertical carbon nanotubes with nanoscale metallic wires and/or particles without the use of lithographic methods. This method deposits metal directly to the base and tip of vertical carbon nanotubes, which leads to isolated nanoscale electrical contacts of the individual nanotubes. This process is adaptable to address individual carbon nanotubes or networks of nanotubes with a common back contact. Further, this technology has the ability to create nanotube contacts with palladium, which is a highly preferred metal for contacting nanotubes because of the resulting ohmic nature of contact. In addition, the nature of the electrodeposition process changes, causing the deposition within pores to cease or slow significantly.

Advantages:
-Simultaneously establish source and drain nanoscale electric contacts
-Annular deposition of electric contacts without lithography

Potential Applications:
-Electronic and chemical sensing devices
-Biological sensing
Feb 1, 2008
Utility Patent
United States
9,487,877
Nov 8, 2016

Feb 4, 2008
CIP-Patent
United States
(None)
(None)

Feb 1, 2007
Provisional-Patent
United States
(None)
(None)
Purdue Office of Technology Commercialization
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Email: otcip@prf.org